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1. Handbook of microlithography, micromachining, and microfabrication

by Rai-Choudhury, P.

Material type: book Book; Format: print ; Literary form: not fiction Publisher: Bellingham, Wash., USA : London, UK : SPIE Optical Engineering Press ; Institution of Electrical Engineers, c1997Other title: Microlithography, micromachining, and microfabrication.Availability: Items available for loan: Dhaka University Science Library [670 476144] (1).

2. Laser precision microfabrication

by Sugioka, Kōji; Meunier, Michel; Piqué, Alberto.

Material type: book Book; Format: print ; Literary form: not fiction Publisher: Berlin : Springer, c2010Online Access: Contributor biographical information | Publisher description | Table of contents only Availability: Items available for loan: Dhaka University Science Library [621.366 LAS] (1).

3. Resonant MEMS : fundamentals, implementation and application / [electronic resource]

by Brand, Oliver; Dufour, Isabelle (Electrical engineer); Heinrich, Stephen M; Josse, Fabien.

Material type: book Book; Format: available online remote; Literary form: not fiction Publisher: Wiesbaden : Wiley-VCH Verlag & Co. KGaA, [2015]Online Access: Wiley Online Library Availability: No items available

Last Updated on September 15, 2019
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